The temperature of a substrate, while the covering is drawing on it’s surface, страница 42

On the basis of the carried out measurements it is possible to draw a conclusion, that full conformity between evaluation data and experimental data it is not observed. The maximal difference between them makes, 35 % that is explained by sufficient roughness of the carried out experiment and that the estimation technique does not take into account all nuances.

Conclusion

As the analysis of the review of works on magnetron sputtering systems research has shown, it is still a question, whether there is now full enough and proved technique of definition of a substrate heat mode when drawing coverings with the help of magnetron sputtering systems, whether the analysis of a heat mode of a substrate when drawing coverings is carried out. More often the optimum heat mode is determined as a result of lines of experiments. Therefore there is a requirement to carry out such analysis and offer a technique of a substrate heat mode estimation.

As indicated above, the main purpose of the work is creation of a technique of a substrate heat mode estimation when drawing coverings with the help of magnetron sputtering systems.

At the first stage physical bases and a principle of action of magnetron sputtering systems have been considered. The processes, which are sources of heat in magnetron sputtering systems, and also processes occurring in a discharge gap of magnetron sputtering systems were determined.

At the second stage influence of working parameters of technological installation on process of dispersion, namely dependence of the dispersion coefficient on a kind of material of a target, a kind of working gas, energy of ions, pressure, conditions of a target surface and its temperatures was revealed. Besides, the analysis of the expressions, permissive to determine the dispersion coefficient and the analysis of angular distribution of the sprayed particles was carried out.

At the third stage methods of calculation of the discharge characteristics of magnetron sputtering systems were considered, distribution function of the sprayed atoms on surfaces of an article and other parameters necessary for creation of a technique of estimation of an article heat mode when drawing coverings with the help of magnetron sputtering systems were determined.

At the fourth stage all materials received in work have been incorporated into uniform system. On the basis of that, taking into account the collected material and the carried out analysis an attempt to develop an algorithm of calculation of a heat mode of an article when drawing coverings with help of magnetron sputtering systems has been made.

The fifth stage was creation of the software for the PC which allows to carry out quickly an estimation of necessary parameters for definition of a heat mode of an article when drawing coverings with help of magnetron sputtering systems.

Thus, to develop an algorithm of calculation of a heat mode of an article when drawing coverings with help of magnetron sputtering systems has been made, based on reasonable use of the useful approaches realized by predecessors, with necessary correction and additions. The technique is simple in circulation and can be easily used in the educational process on corresponding specialties.

List of references