The temperature of a substrate, while the covering is drawing on it’s surface, страница 17

Along with aforesaid it is completely clear, that the temperature of a target should render and indirect influence on process of dispersion. Really, the metal heating results in amplification of the superficial migration of atoms of metal and contamination, increases diffusion of dirts from depth of metal to its surface. Heating changes elastic properties of metal, eliminates (anneals) the defects of a lattice created by ions, influences on sorption of molecules from vacuum volume. Probably, the various degree of manifestations of the specified processes results in supervision seeming inconsistent results of measurements.

5.6 The basic conclusions on influence of working parameters of technological installation on process of dispersion

Thus, studying the cathode dispersion of various polycrystalline materials allows to draw the following basic conclusions.

1. Threshold energy at which a process of dispersion takes place for various combinations metal - ion, lays in the range of ion energies 5 … 35 eV. The increasing of energy of ions up to 100 … 200 eV results in sharp growth of an output of atoms from 10-5 up to 10-1 atom / ion. With the further increasing of ion energy growth of the dispersion coefficient which is gradually slowed down proceeds, reaching a maximum. For easy ions (Н +, About +, Not +) with energies about 10 keV the factor of dispersion passes through rather sharp maximum and then decreases with the further increasing of ion energy. For heavy ions (Аг +, Kr +) is observed a wide maximum in the ion energy area 30 … 100 keV.